Wafer breakage is the most serious impact of killer crystalline defects. About 0.1 to 0.2% of silicon wafers break. The ...
Defect states refer to electronic energy levels that arise from imperfections or irregularities in the crystal structure of materials, particularly in semiconductors and insulators. These ...
“Launching a new Surfscan platform is an exciting event for KLA-Tencor,” said Ali Salehpour, senior vice president and general manager of the Surfscan / ADE division at KLA-Tencor. “The visible-light ...
Unpatterned wafer inspection, which has flown well under the radar for most of the semiconductor industry, is becoming more critical amid the need to find defects earlier in the manufacturing process ...
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